Picture1CoreFlow’s air floating based conveying and handling solutions for fab automation enable the transportation of substrates with minimal contact between the glass substrate and the conveyor, resulting in low impact on the glass and low TACT.

CoreFlow’s air cushion motion systems enable loading, unloading, conveying, flip over and gripping of glass substrates of all weights and sizes, with precise positioning and flattening. Multiple mounting and configuration options ensure that CoreFlow solutions accurately and economically fit into any manufacturing line.

The conveying solutions are powered by a Vacuum Pre-Loaded (VPL) friction drive enabling high acceleration regardless of substrate weight. VPL enables linear, vertical, rotation and divert conveying.

 

Fab Automation - Key Features and Benefits

  • Higher process quality
  • High acceleration and substrate speed
  • Increased yield and throughput
  • Lower maintenance costs
  • Low glass impact
  • Minimal contact between conveyor and glass

OLED Inkjet Printing01

FPD Inspection (AOI)02

UV Curing03

Flexible Substrates04.2

Non Contact Chuck for Semiconductor05

Slit Coating06.2

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