SmartNozzles™ technology is at the heart of CoreFlow's non-contact air floating solutions. Through their vertical flow pattern and innovative aerodynamic design, SmartNozzles™ precisely control the flow of air, gas or liquid, and produce an exceptionally stiff and stable air cushion – significantly stiffer than porous material-based technologies. This, in turn, enables multiple handling and conveying solutions that deliver outstanding performance for flat panel display AOI, Slit Coating, InkJet Priting and other precision manufacturing applications.C

SmartNozzles™ can be arranged in numerous configurations to form air cushions with various support accuracies, clamping forces, and other characteristics. The SmartNozzle™ fluid blocking mechanism maintains a uniform flow with a mass flow rate of 1/10 to 1/100 of a conventional nozzle.

SmartNozzles™ behave like stiff return springs. When the gap is reduced, the exit pressure is significantly increased and vice versa. A typical SmartNozzle™ array is 100 times stiffer than a vehicle spring.

 

SmartNozzles™ key features and benefits:

  • High internal pressure drop
  • Low mass flow rate
  • Independent behavior of each nozzle
  • No moving parts, for enhanced reliability and durability
  • Fast response time

OLED Inkjet Printing01

FPD Inspection (AOI)02

UV Curing03

Flexible Substrates04.2

Non Contact Chuck for Semiconductor05

Slit Coating06.2

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